XY移動范圍

Upright:   100 mm x 100 mm

Inverted:   114 mm x 90 mm

XY 軸分辨率

0.088 µm

XY 軸RMS可重復性

< 0.8 µm (typical)

XY 軸最大速率

7 mm/sec

Z 軸分辨率

0.05 µm

Z 軸可重復性

± 0.1 µm (typical)

Z 軸最大速率

0.6 mm/sec

Lead Screw Pitch Options

Rotary Encoder Resolution

Maximum Speed

12.70 mm  (Super-coarse)

176 nm

14 mm/sec

6.35 mm  (Standard)

88 nm

7 mm/sec

1.57 mm  (Fine)

22 nm

1.75 mm/sec

0.318 mm  (Ultra-fine)

4.4 nm

0.35 mm/sec

Axis

Scale Resolution

Scale Accuracy

XY

20 nm

0.5 µm per 10 mm
1.5 µm per 100 mm

Z   (12 mm and 25 mm stroke)

50 nm

0.03 µm per mm